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Verity Instruments: new general purpose spectrograph

Verity Instruments has released its new General Purpose Spectrograph, the SD1024FLTM. Compared to the previous model – the SD1024DLTM – the RoHS compliant SD1024FL offers, says the US company, several…

Verity Instruments has released its new General Purpose Spectrograph, the SD1024FLTM. Compared to the previous model – the SD1024DLTM – the RoHS compliant SD1024FL offers, says the US company, several improvements including better line shape uniformity, improved resolution, improved noise equivalent power and the addition of second order blocking. The SD1024FL is used with Verity“s SpectraViewTM application software, which is based upon the company“s 29 years of experience in endpoint detection and process control. Tool integration is possible using RS232, Ethernet, and Digital I/0. Verity Instruments, Inc. is a leading supplier of advanced instrumentation and software for optical endpoint determination as required in etch, CVD etchback, photoresist strip, CMP endpoint and related applications. Additional products include instruments for film thickness measurement. Verity has been providing optical instruments for semiconductor processing since 1980.

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