Page 177 - Flat Glass World Directory 2018

GLASSWORKS

interferometer that provides
fast and accurate metrology
for semiconductor wafers up
|o ƒƏƏll bm 7b-l;|;uĺ m
v;1om7v †r |o ƒ lbѴѴbom 7-|-
points are collected with
v†0Ŋlb1uom -11†u-1‹ ;m-0Ѵbm]
|o|-Ѵ |_b1hm;vv -m7 Y-|m;vv
1_-u-1|;ubŒ-ঞom oˆ;u |_; ;mঞu;
v†u=-1;ĺ
$_; Ѵ-| -v|;u " ruoˆb7;v
robust metrology for a variety
o= -rrѴb1-ঞomv =uol 1olrѴ;Š
components and assemblies to Erwin Manufacturing Plant, Erwin, N.Y.
transparent materials and wafer
l;|uoѴo]‹ĺ $_; Ѵ-| -v|;u
" Ŋ bv 1omC]†u;7 |o
simultaneously measure two
sides of a component or
assembly providing absolute
|_b1hm;vv -m7 r-u-ѴѴ;Ѵbvl
l;-v†u;l;m|vĺ
$_; -0bѴb|‹ |o l;-v†u; Y-|m;vvķ
|_b1hm;vvķ -m7 |_b1hm;vv
ˆ-ub-ঞom o= ƒƏƏ lbѴѴbl;|;u ]Ѵ-vv
-m7 vbѴb1om ‰-=;uv bv 1ubঞ1-Ѵ
=ou v†11;vv=†Ѵ bm|;]u-ঞom o=
ƒ -vv;l0Ѵb;vĺ $u-7bঞom-Ѵ
Sullivan Park Research and Development Center, Erwin, N.Y.
1om|-1| ruo0;v ou 1omˆ;mঞom-Ѵ
interferometry systems are
too slow or do not have the
necessary accuracy for larger
C;Ѵ7v o= ˆb;‰ĺ

®
TROPEL ) !
ANALYSIS SYSTEMS
oumbm] "r;1b-Ѵ|‹ -|;ub-Ѵv _-v
a long heritage of providing
voѴ†ঞomv |o v;lb1om7†1|ou
;t†brl;m| l-m†=-1|†u;uvĺ
The Tropel line of wafer
-m-Ѵ‹vbv ;t†brl;m| ;m-0Ѵ;v
measurement of wafer

(-"44803,4 r (-"44803,4 175