The Japanese optical glass group Hoya Corporation plans to increase its output of the mask blanks and photo masks used in sintering DRAM circuits. It will add a manufacturing line for high-precision m…
The Japanese optical glass group Hoya Corporation plans to increase its output of the mask blanks and photo masks used in sintering DRAM circuits. It will add a manufacturing line for high-precision mask blanks compatible with today“s finer circuit processing, and has brought in a fast photo mask drawing system for 64-megabit DRAM. The new mask blanks line costs Yen 6 billion. The new line will start operation in September at Hoya“s plant in Nagasaka, Yamanashi Prefecture. It will make six-inch mask blanks for 64 and 256-megabit DRAM. The company is now also planning for a line to make nine-inch mask blanks, which would correspond to 12-inch silicon wafers.