20 May 1999: US-based Cymer, Inc., and Carl Zeiss Lithos, a subsidiary of Carl Zeiss, announced that they have formed a strategic alliance to facilitate joint development and design efforts of leading…
20 May 1999: US-based Cymer, Inc., and Carl Zeiss Lithos, a subsidiary of Carl Zeiss, announced that they have formed a strategic alliance to facilitate joint development and design efforts of leading-edge optical components and modules for lithography light sources in alignment with the Semiconductor Industry Association (SIA) roadmap. Cymer is a world supplier of illumination sources essential for deep ultraviolet (DUV) photolithography, while Carl Zeiss Lithos is a technology leader in optics and precision engineering. In a recent company statement, Carl Zeiss said that optics have become an increasingly critical component of light sources for lithography tools as finer resolutions and line widths are required for the semiconductor industry to remain on or exceed Moore“s Law curve. “We are extremely pleased to have formed this alliance with Zeiss,” said David Skinner, vice president of global supply management for Cymer. “Both companies will gain a better understanding of the interaction between the light source and the optics within the lithography tool. This knowledge will be crucial as Cymer continues to develop next-generation light sources to support the global lithography marketplace. Zeiss“ unique capabilities and expertise in optics and coatings, along with Schott ML“s optics materials development, complements Cymer“s proficiency in providing next-generation light sources for lithography.” “It is a major step to form this alliance with the leading supplier of illumination sources for microlithography,” said Jurgen Krause-Bonte, general manager of Carl Zeiss Lithos. “The partnership reflects the successful common activities to manufacture leading-edge optical components together with Schott ML and their key competence in the field of optical materials for lithography. The cooperation with Cymer strengthens the Carl Zeiss focus to form strategic alliances with leading-edge semiconductor equipment companies.”